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ResearchSemiconductor manufacturing
CL-R05

Semiconductor manufacturing carbon & embodied compute

From fab process inventory to wafer, die, package and lifetime useful compute.

Abstract. Critical Load's semiconductor programme treats one of carbon accounting's most data-constrained areas as a first-class measurement problem. The working method traces fab electricity, process gases, abatement, chemicals, ultrapure water, yield and advanced packaging through to product-level embodied carbon and, finally, a compute-intensity denominator.

Long-term research questionHow much carbon exists before an accelerator becomes operational?
Active projectCL-P02 / Semiconductor workstream
Current responsibilityRunwen Jin / Product & Carbon Systems
Next public outputCL-SCM method + public benchmark bridge
FABElectricityProcess gasesAbatementChemicals / UPWWAFERNodeWafer startsGOOD DIEDie areaYieldPACKAGESubstrateHBM / backendCOMPUTEAcceleratorServerLifetime workgCO₂e / useful computeALLOCATION + YIELD + LIFETIME DENOMINATOR
The carbon chain begins before a GPU exists. Critical Load treats fab process inventory and yield as first-class evidence, then carries manufacturing impact through packaging and system integration to useful delivered compute.

Semiconductor carbon is a measurement problem before it is a reporting problem.

The hardest variables are often inside the fab: process gas use and destruction, cleanroom electricity, chemical and water inventories, node-specific process intensity, equipment allocation, wafer yield and confidential supplier data.

PFC / NF₃PROCESS GASES

Gas-specific inventory and destruction efficiency can materially change direct process emissions.

ABATEDESTRUCTION

Nameplate abatement is not automatically equivalent to realized destruction performance.

YIELDGOOD DIE

The same wafer-level impact is allocated across the number of usable dies that leave the process.

UPWULTRAPURE WATER

Water and chemical treatment belong inside the manufacturing inventory, not outside the boundary.

Research positionPrimary manufacturing evidence is frequently confidential. Critical Load separates publishable method and normalized sensitivity from non-public fab records rather than replacing missing data with an unexplained industry average.

Fab inventory is carried through wafer, die and package allocation.

01

Fab inventory

Electricity, process gases, abatement, chemicals, UPW, equipment and facility allocation.

02

Wafer basis

Process node, wafer diameter, wafer starts and manufacturing period.

03

Good die

Die area, gross dies, yield and usable output determine the allocation denominator.

04

Package

Substrate, advanced packaging, memory/HBM and backend manufacturing are added.

05

Useful compute

Product carbon is normalized by lifetime utilization and delivered compute.

Good-die allocationIdie = allocated wafer impact / good dies + die-specific backend impact

Yield, allocation rule and data-quality class remain attached to the result.

The dominant driver can move when fab, node, yield and packaging change.

Our semiconductor work is designed around sensitivity rather than a single universal chip factor. The method tests which input actually controls the result under the stated manufacturing configuration.

VariableWhat changesExpected result effectEvidence requirement
Fab electricity mixkgCO₂e / kWhOperational manufacturing carbon shifts with local electricityFab / supplier period
Process gas + abatementGas use and destructionDirect process emissions can become a major driverGas-specific inventory
Good-die yieldUsable dies per waferLower yield raises impact allocated to each good dieNode / product yield
Advanced packagingSubstrate, HBM, backendPackaging can shift the balance after die fabricationPackage bill / process data

Directional result structure. Proprietary fab-level primary data is not exposed in the public working site.

Published product carbon anchors the downstream system.

A public HGX H100 baseboard PCF reports 1,312 kgCO₂e cradle-to-gate, with 91% attributed to materials and components. Critical Load uses public product-level PCFs as benchmark checks, not as a substitute for upstream semiconductor process research.

FIGURE 05.2
HGX H100 component contribution
CL-E05-P01
Memory
546 kg / 42%
Integrated circuits
332 kg / 25%
Thermal components
230 kg / 18%
Assembly
8.6 kg

NVIDIA, Product Carbon Footprint Summary for HGX H100 (2024) ↗. The 1,312 kgCO₂e cradle-to-gate result and component shares are used as a public benchmark check, not as Critical Load primary data.

Embodied carbon becomes decision-useful only after a compute denominator is attached.

In the existing public reference comparison, embodied compute intensity falls from 0.66 to 0.50 gCO₂e/exaflop — about 24% — illustrating why product carbon alone is not enough for hardware comparison.

FIGURE 05.3
Embodied carbon per exaflop
CL-E05-P02
H100 system
0.66 g/exaflop
B200 system
0.50 g/exaflop
Embodied compute intensityIemb = manufacturing carbon / lifetime useful compute

Utilization, lifetime and delivered work are first-class parameters.

Semiconductor manufacturing is the upstream component of the broader compute lifecycle model.

CL-SCM ends at an embodied compute intensity. CL-R02 then combines that upstream result with hardware integration, facility, electricity, cooling, shared services and replacement/end-of-life to produce full lifecycle compute carbon.

Semiconductor contributionIsemi → Icarbon,LC → Lcarbon

The semiconductor result never substitutes for the rest of the lifecycle; it feeds it.

Critical Load extensionThe difficult fab evidence remains traceable all the way into the final carbon-limited capacity instead of being hidden inside a generic embodied-carbon factor.